3M氟化液FC-3283是無色透明全氟化學品,具有良好的化學惰性、電氣絕緣性能、熱傳導性和的第表面張力應用于半導體制造廠作為熱傳導介質。其液體溫度范圍為-50°C 至128°C,主要應用于蝕刻設備、離子注入設備、測試設備及其他設備。因為FC-3283是單一組分,所以其成分不好出現降解或者過期。FC-3283沸點高,其隨時間的揮發也比較少。
3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time.
















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