Hydrogen Fluoride HF 1.05-12 ppm MIDAS-E-HFX
Hydrogen Fluoride (Low Level) HFL 0.18-2 ppm MIDAS-E-HFL
Hydrogen Sulfide H2S 3.6-40 ppm MIDAS-E-H2S
Methane (%LEL) CH4 6.5-99% LEL MIDAS-E-LEL*
Methyl Fluoride CH3F 8-120 ppm MIDAS-E-XHF
Tungsten Hexafluoride WF6 1.05-12 ppm MIDAS-E-HFX
Tungsten Hexafluoride (Low Level) WF6 0.18-2 ppm MIDAS-E-HFL
Phosphine PH3 110-1200 ppb MIDAS-E-PH3
Silane SiH4 1.8-20 ppm MIDAS-E-SHX
Silane (Low Level) SiH4 0.18-2 ppm MIDAS-E-SHL
Sulfur Dioxide SO2 0.7-8 ppm MID