Gas Name Chemical Formula Range Sensor Part Number

Ammonia NH3 9-100 ppm MIDAS-E-NH3

Arsine AsH3 18-200 ppb MIDAS-E-ASH

Boron Trichloride BCl3 0.72-8 ppm MIDAS-E-HCL

Boron Trifluoride BF3 0.72-8 ppm MIDAS-E-HFX

Boron Trifluoride (Low Level) BF3 0.18-2 ppm MIDAS-E-HFL

Bromine Br2 0.036-0.4 ppm MIDAS-E-BR2

Carbon Dioxide CO2 0.15-2.0% MIDAS-E-CO2

Carbon Monoxide CO 9-100 ppm MIDAS-E-COX

Chlorine Cl2 0.18-2 ppm MIDAS-E-HAL

Chlorine Dioxide ClO2 0.036-0.4 ppm MIDAS-E-BR2

Diborane B2H6 36-400 ppb MID