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新型肖特基場發(fā)射掃描電鏡SU7000
－可獲得樣品的各種信息，實(shí)現(xiàn)高通量分析－

肖特基場發(fā)射掃描電鏡SU7000，它縮短了通過采集多種信號獲取樣品多種信息的時(shí)間，真正實(shí)現(xiàn)了高通量的觀察與分析。

                                             SU7000外觀圖

 
    掃描電子顯微鏡（SEM）可通過檢測樣品激發(fā)出的二次電子、背散射電子、X射線等信號，獲得從微細(xì)結(jié)構(gòu)到組成成分等各種信息，因此被廣泛應(yīng)用于納米技術(shù)、半導(dǎo)體、電子器件、生物、材料等諸多領(lǐng)域。隨著SEM的應(yīng)用范圍在不斷擴(kuò)大，對觀察時(shí)間的縮短、信號的迅速高效采集提出了更進(jìn)一步的需求。
   SU7000采用全新設(shè)計(jì)的探測器，使得對二次電子信號、背散射電子信號的檢測以及分離能力大大提升。以前我們要根據(jù)獲得的信號來調(diào)整樣品與透鏡之間的距離（工作距離／以下簡稱WD），以設(shè)置最合適的觀察與分析條件，而SU7000通過新研發(fā)的樣品倉以及檢測器系統(tǒng)，可在不改變WD的條件下更高效地接收各種信號，縮短了樣品觀察和分析的時(shí)間，提高了測試效率。
    而且，SU7000還配置了可同時(shí)6通道顯示界面（前代機(jī)型只能同時(shí)顯示4通道），進(jìn)一步升級SEM控制系統(tǒng)，大幅提高了信號獲取速度，由此實(shí)現(xiàn)了樣品的高通量觀察。
    它還標(biāo)配超大樣品倉，增設(shè)了附件接口，可適用于各種樣品的觀察與分析。
日立將在8月5日（星期日）～8月9日（星期四）在美國馬里蘭州舉辦的“Microscopy & Microanalysis"及9月5日（星期三）～9月7日（星期五）在幕張展示中心（千葉縣千葉市）舉辦的“JASIS 2018"上展示這款SU7000，預(yù)計(jì)每年銷量有望達(dá)150臺。
    日立科學(xué)系統(tǒng)事業(yè)部以2020年成為電子顯微鏡行業(yè)一為中期戰(zhàn)略目標(biāo)，今后仍將全力推動產(chǎn)品研發(fā)與市場推廣，努力為制造業(yè)作出更大的貢獻(xiàn)。作為、前沿的事業(yè)創(chuàng)新型企業(yè)，今后以成為提供和解決方案的企業(yè)為目標(biāo)，始終站在客戶的立場，快速滿足客戶和市場需求。

【主要特點(diǎn)】
1．在相同WD的條件下，可同時(shí)實(shí)現(xiàn)二次電子、背散射電子觀察與X射線分析
2．最多可同時(shí)實(shí)現(xiàn)6通道檢測與顯示
3．在像素10,240 x 7,680時(shí)，也可獲得圖像數(shù)據(jù)
4．同級別*設(shè)備中最多的可配置18個(gè)附件接口
5．支持300Pa的低真空模式（選配）
*空間分辨率在1 nm/1 kV以下

【主要規(guī)格】

Key Concept

1. Versatile Imaging Capability
   The SU7000 excels in fast acquisition of multiple signals to address expansive SEM needs, from imaging a wide field of view to visualizing sub-nanometer structures and everything in between.
    The incorporation of newly designed electron optics and detection systems allows for efficient simultaneous acquisition of multiple secondary electron and back-scattered electron signals.
2. Multi-Channel Imaging
   The number of the detectors mounted on the SEM is ever increasing, along with the need to display all collected information effectively.
    The SU7000 is capable of processing, displaying, and saving up to 6 signals simultaneously to maximize information acquisition.
3. Wide Variety of Observation Techniques
   The specimen chamber and the vacuum system are optimized for:
   ?Large specimen size
   ?Sample manipulation at various axes
   ?Variable pressure conditions
   ?Cryogenic conditions
   ?Heating and cooling in-situ observation
4. Microanalysis
   The electron gun is equipped with a Schottky emitter that provides up to 200 nA beam current to accommodate various microanalysis applications.
    The specimen chamber and port layout are designed to incorporate multiple analytical options including EDX, WDX, EBSD, cathodoluminescence, and more.
    The SU7000 with the combination of numerous analytical accessories unifies multi-discipline techniques in a single platform.

Imaging Performance

Enhanced Information Acquisition

Single-Scan Multi-Signal Imaging

Specimen: Organic-coated gold rods

Specimen courtesy of: Mr. Smart and Ms. Je Chemistry Dept.,
Vassar College

Simultaneous image acquisition for surface micro-structural information (UD), surface coating (MD), and overall topographic information (LD). Acceleration voltage: 1 kV

Intuitive Graphical User Interface

Enhanced Signal Display

• Customizable display modes.
• Single and Dual-monitor configurations.
• Simultaneous image display up to 4-ch (single) and 6-ch (dual).
• Chamber Scope and SEM MAP for optical stage navigation.

Highly Flexible Screen Layout

The software is capable of display 1, 2, or 4 signals including the chamber scope or SEM MAP on a single monitor.
Additionally, the operation panel can be customized to display submenus anywhere on the screen.

Dual Monitor

The first monitor can be used as a dedicated image display while the second monitor is utilized for operation.
Five detector images (UD, LD, UVD, MD, and PD-BSED) and SEM MAP of non-metallic inclusions in a steel specimen are displayed (left).
The screen shows the operation panel menu and the thumbnail image window on one screen (right).
The dual-monitor configuration supports increased productivity with expanded w

Expandable Observation and Analysis

Large specimen chamber and large stage

The specimen chamber can accommodate a tall specimen of φ 200 mm or 80 mm in height and 18 accessory ports. The large stage travels 135 mm (X) x 100 mm (Y) and can accept up to 2 kg of specimen.^(*) Large specimen or variable type of sub-stages can be easily mounted on the front-opening large stage door.

external view of the specimen chamber featuring 18 accessories por

external view of the stage. XY movable range: 135×100 mm

(*)at 0° tilt

Camera Navigation^(*)

Left: Picture of the sample captured by the camera equipped inside the chamber.
Right: Camera image transferred to the SEM MAP screen for navigation.

The camera navigation feature correlates an optical image to the target observation area.
The camera installed in the specimen chamber captures the specimen image at the time of specimen introduction. The image is transferred to the SEM MAP screen for a graphically driven navigation interface.
Camera navigation supports a maximum of φ 100 mm specimen.

(*)

Camera navigation function is optional

Detection System Enabling Dynamic Observation

The SU7000 supports observation under various environmental conditions. A variety of detectors ^(*) such as UVD and MD are selectable in addition to the PD-BSED for observation under low-vacuum conditions. 

Detector Selection Under Low-Vacuum Conditions
Specimen: Fiber with metallic oxide
Left: MD (Backscattered electron) image
Right: UVD (SE image)
The oxide dispersion and fiber layering state are observed respectively.

 

Improved PD-BSED Response Speed

Left: Traditional PD-BSED response at the scan rate of 30 ms x 64 frames
Right: SU7000 PD-BSED image demonstrating improved response and image quality to expａnd in-situ observation capability

Specifications

Image Resolution	Resolution SE		0.8 nm@15 kV
			0.9 nm@1 kV
Magnification			20～2,000,000 x
Electron Optics	Emitter		ZrO/W Schottky Emitter
	Accelerating Voltage		0.1～30 kV (0.01 kV step)
	Probe Current		Max. 200 nA
Detectors	Standard Detectors		UD（Upper Detector)
			MD（Middle Detector）
			LD（Lower Detector)
	Optional Detectors		PD-BSED（Semiconductor type）
			UVD (Ultra Variable Pressure Detector）
Variable Pressure(VP) Mode (Option)	Pressure Range		5～300 Pa
	Available Detectors in VP mode		PD-BSED, UVD, UD, MD,LD
Specimen Stage	Stage Control		5-axis Motor Drive
	Movable Range	X	0～135 mm
		Y	0～100 mm
		Z	1.5～40 mm
		T	-5～70°
		R	360°
Specimen Chamber	Specimen Size		Max. φ200 mm, Max. 80mm Height
Monitor（Option)			23 inch LCD（1,920×1,080) , supports dual monitors operation
Image Display Mode	Large Screen Display Mode		1,280×960 pixels
	Single Image Display Mode		800×600 pixels
	Dual Image Display Mode		800×600 pixels、1,280×960 pixels with dual monitors
	Quad Image Display Mode		640×480 pixels
	Hex Image Display Mode w/dual monitors		640×480 pixels with dual monitors
Image Data Saving	Pixel Size		640×480、1,280×960、2,560×1,920、5,120×3,840、10,240×7,680
Optional Accessories	Energy Dispersive X-ray Spectrometer (EDX)
	Wavelength Dispersive X-ray Spectrometer (WDX)
	Electron Backscattered Diffraction Detector (EBSD)
	Cathodoluminescence System (CL)
	Cryogenic Transfer System
	Compatible with various types of sub-stages

Installation Diagram